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September 18, 20250 citations

Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

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WHW. HettelNJNicholas W. JenkinsGSG. Seifert

Key Points

  • The tabletop coherent soft X-ray source achieves a 6.7 nm wavelength that enhances coherence in diffraction measurements.
  • This innovation facilitates scattering and imaging applications, further expanding the possibilities in nanotechnology.
  • The use of this stable source is essential for advancing soft X-ray diffraction technologies in practical settings.
  • Enhanced capabilities for imaging and scatterometry at this scale could reshape the landscape of material characterization.

Abstract

We report the development and use of a long-term stable tabletop coherent soft X-ray source for coherent diffraction measurements at 6.7 nm wavelength. This light source can enable widespread applications in scatterometry and imaging.

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Cite This Study

Hettel et al. (2025) studied this question.

synapsesocial.com/papers/68d463f131b076d99fa638b3https://doi.org/10.1364/cleo_si.2025.pd101_6
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