Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

Key Points

• The tabletop coherent soft X-ray source achieves a 6.7 nm wavelength that enhances coherence in diffraction measurements.
• This innovation facilitates scattering and imaging applications, further expanding the possibilities in nanotechnology.
• The use of this stable source is essential for advancing soft X-ray diffraction technologies in practical settings.
• Enhanced capabilities for imaging and scatterometry at this scale could reshape the landscape of material characterization.