Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

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This is a Experimental Study study.

W. Hettel; Nicholas W. Jenkins; G. Seifert; Drew Morrill; J.H. Thurston; Russell D. Larsen; G. Golba; David R. Carlson; Henry C. Kapteyn; M. M. Murnane; M. Hemmer

doi:10.1364/cleo_si.2025.pd101_6

January 1, 2025

Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

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Key Points

The tabletop coherent soft X-ray source achieves a 6.7 nm wavelength that enhances coherence in diffraction measurements.
This innovation facilitates scattering and imaging applications, further expanding the possibilities in nanotechnology.
The use of this stable source is essential for advancing soft X-ray diffraction technologies in practical settings.
Enhanced capabilities for imaging and scatterometry at this scale could reshape the landscape of material characterization.

Implication

This development enables coherent diffraction measurements in various applications, suggesting enhanced imaging techniques.

Abstract

We report the development and use of a long-term stable tabletop coherent soft X-ray source for coherent diffraction measurements at 6.7 nm wavelength. This light source can enable widespread applications in scatterometry and imaging.

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Cite This Study

Hettel et al. (2025) studied this question.

synapsesocial.com/papers/68d463f131b076d99fa638b3 https://doi.org/10.1364/cleo_si.2025.pd101_6

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Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

Key Points

Implication

Abstract

Discussion

Cite This Study

Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source

Key Points

Implication

Abstract

Discussion

Cite This Study

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