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Demonstration of acousto-optic Mach-Zehnder modulators with silicon-based piezoelectric film, indicating improved modulation capabilities.
Acousto-optic Mach-Zehnder modulators with push-pull-like structure in silicon photonics based on piezoelectric AlScN film are demonstrated with a V π L of 1.60 V·cm, enabling efficient band-pass filtering and modulation simultaneously in microwave-photonic signal processing.
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Huang et al. (2025) studied this question.
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