We used molecular dynamics simulations to study bubble formation in confined water in Si and SiO 2 nanochannels. Our simulations showed that surface wettability plays a major role in determining the mechanism type of bubble formation in confined geometry of nanofeatures. Hydrophobic Si surfaces and hydrophilic SiO 2 surfaces led to heterogenous and homogenous bubble formation, respectively. Such observations can help in understanding cavitation effects during etching/cleaning processes of features at nano-scale dimensions.
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Nasrabadi et al. (2024) studied this question.
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