Ultra‐Durable Polysilicon Based Tribovoltaic Nanogenerators for Bearing In Situ Rotational Speed Sensing

Abstract Tribovoltaic nanogenerator (TVNG) is an emerging energy device with the advantages of direct current and high power density. At present, many TVNGs are based on single‐crystal materials, which are expensive and fragile during structural processing. Here, a polysilicon‐based TVNG for bearing in situ rotational speed sensing is developed, which has the same level of performance and lower cost compared to monocrystalline silicon. The defects in polysilicon can provide additional carriers, but the grain boundaries can suppress the transport process of carriers, resulting in almost the same electrical output as single crystals. The oiled sliding mode TVNG has an impressive durability of up to 1 million cycles. The friction coefficient of rolling mode TVNG is as low as 0.14. Based on rolling mode polysilicon TVNG, the tapered roller bearing, thrust ball bearing, and deep groove ball bearing are manufactured by cutting and engraving processes. Moreover, their short‐circuit current and open‐circuit voltage are linear with speed, and the fitting coefficient is as high as 0.99, providing favorable conditions for in situ rotational speed sensing. This work presents a structure‐function integrated bearing design methodology, demonstrating the considerable potential of in situ sensing for intelligent components in the industrial Internet of Things.