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September 1, 2024Journal of Instrumentation

Influence of the edge effect of the solenoid magnetic field on the discharge process of magnetron sputtering in long and narrow chambers

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PWPengcheng WangBZBangle ZhuJLJiaming Liu

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Wang et al. (2024) studied this question.

synapsesocial.com/papers/68e59fabb6db64358753a4cbhttps://doi.org/10.1088/1748-0221/19/09/p09027
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  1. 1Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system2009 · 41 citations