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August 22, 2024Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forumOpen Access

Early Detection of Bar-Shaped 1SSF before Expansion by PL Imaging

Takuya Morita Yohsuke Matsushita Yasuyuki Igarashi Kazumi Takano

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Abstract

In this study, we investigated how bar-shaped 1SSF (Single Shockley-type stacking fault) in a chip of a SiC (Silicon Carbide) epitaxial wafer expanded with UV (ultraviolet) irradiation and observed it with PL (Photoluminescence) imaging and demonstrated early detection of bar-shaped 1SSF with an algorithm for automatic detection for the initial shape of bar-shaped 1SSF. Furthermore, we estimated that it was 83% how much UV irradiation time could be reduced.

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Cite This Study

Morita et al. (2024) studied this question.

synapsesocial.com/papers/68e5b5fab6db64358754ece7 https://doi.org/10.4028/p-shhhr7

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