Computational Study of the Electrical Conductivity of the Antenna on the Transmission Spectra of the Flat Cutoff Sensor

With the increase in the importance of process analysis based on the measurement of plasma parameters, there is a growing interest in noninvasive plasma diagnostic methods.The flat cutoff sensor provides non-invasive, non-perturbative, and real-time measurement of plasma parameters.However, there is a lack of research on the measurement of transmission spectrum and electron density by altering the materials of the components of the flat cutoff sensor.In this study, the characteristics of the transmission spectrum and electron density measurement of a flat cutoff sensor were analyzed by changing the electrical conductivity of the antenna during a simulation.The electrical conductivity of the antenna varied from 0.1 to 1 × 10 6 S/m, the cutoff frequency corresponding to electrical conductivity was the same as the input plasma frequency, and the intensity of the minimum transmission spectrum decreased from -109 to -206 dB when the electrical conductivity of the antenna decreased from 1 × 10 6 to 0.1 S/m.The measurement characteristics were verified by examining how the intensity of the minimum transmission spectrum varied with the conductivity of the antenna using electric field profiles and strengths.These results can help in identifying the suitable materials for the components of the flat cutoff sensor.