Study on the Machining Accuracy of Soft Elastic Material Using Cryogenic Dicing

Abstract Dicing is one of the common processing methods for soft elastic materials. However, as the processing dimensions continue to decrease, the machining accuracy of the workpiece becomes worse. In this work, a three-dimensional (3D) finite element model (FEM) of dicing processing is established by using finite element software ABAQUS and is compared with experimental results. Based on the established 3D dicing FEM, the influence of temperature, depth of cut, and spindle speed on the dicing process is studied. The results show that in the traditional soft elastic material dicing process, the increase in spindle speed and the decrease in processing dimensions led to the vibration of the tool, tilt and twist deformation of the workpiece, which become the main reasons for the poor machining accuracy. The application of cryogenic processing can effectively suppress the tilt and twist deformation of the workpiece. Under high spindle speed, cryogenic dicing can also somewhat mitigate the negative influence of tool vibration.