The paper reports on a new Zr/Be/Si/Al multilayer structure that provides record reflectances of up to 67% and a spectral resolution of Δλ = 0.63 nm (λ / Δλ ≈ 27) in the spectral range of 17-20 nm. It is shown that the structure has a high temporal stability of extreme ultraviolet (EUV) optical characteristics. This fact makes the structure promising for future missions to study the solar corona.
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Полковников et al. (2024) studied this question.
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