Features of the operation of MEMS in the nonlinear approximation for restoring and electrostatic forces

The results of investigation of behavior features of MEMS with varying interelectrode gap in the nonlinear approximation are presented. The conditions for the occurrence of two points of unstable equilibrium and the conditions for the controllability of the system are obtained. Conditions leading to localization of self-oscillations either in the area of positive or in the area of negative displacements are found