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Zinc oxide (ZnO) with a wurtzite structure exhibits excellent optoelectronic and semiconductor properties, thus showing promising applications in the field of ultraviolet (UV) detection. However, the existing ZnO-based UV photodetectors on rigid substrates are limited in practical applications due to the constraints of rigid substrates, making it difficult to meet the complex and demanding environmental requirements. In this work, ZnO thin films were deposited on flexible polyethylene terephthalate (PET) substrate by radio frequency (RF) magnetron sputtering technique. Metal-semiconductor-metal (MSM) structured ZnO UV photodetectors were fabricated. The influence of oxygen-argon ratio on the deposition of ZnO thin films and the performance of flexible UV photodetectors was investigated. It was found that ZnO thin films exhibited higher crystalline quality when the oxygen-argon ratio was 10:40. This research provides a material basis for the development of flexible UV photodetectors.
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Duan et al. (2024) studied this question.
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