Ligands play roles in determining the properties of metal-containing EUV resists. In this study, a new series of complexes of the type R3Sb(O2CR')2 have been developed, showcasing positive-tone imaging. Ten R3Sb(O2CR')2 complexes were synthesized with variations in the R and R' groups. Studies focusing on development solution, polymerizable olefin content, and molecular weight of these complexes indicated that styrene carboxylate ligands and low molecular weight R groups demonstrated positive-tone performance with fast photospeeds.
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Greenough et al. (2024) studied this question.
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