Behavior of Secondary Electrons: Estimation of the Ionization Yield in Poly(hydroxystyrene) under EUV Irradiation Based on Binary Encounter Theory and Continuous Slowing-Down Spectrum

In order to understand the behavior of secondary electrons in the initial processes occurring in EUV irradiation, the binary encounter collision theory was used for the calculation of collision cross section of low-energy electrons, and Spencer Fano's theory was used for the continuous electron slowing-down process. Using the ionization and excitation cross sections and the continuous slowing-down spectra, the ionization yield and the excited state yield for various electron energy were calculated in poly(hydroxystyrene) after EUV irradiation. The yields for 80 eV photoelectron are about 3 for ionization and 4 for excited states. The stopping power and mean free path of secondary electrons based on the cross section were also estimated for the discussion of electron range in the polymer.