Ultrashort pulse (USP) laser processing has great potential for precise microfabrication. Toward higher quality and productivity, we have developed the data-driven USP laser processing in which process parameters can be controlled based on data such as in-process monitoring and artificial intelligence (AI) optimization. In this work, stable formation of laser-induced periodic surface structure (LIPSS) in nanoscale on transparent glass materials has been demonstrated by the data-driven UPS laser processing.
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Narazaki et al. (2024) studied this question.
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