Monochromatic monitoring by intermittent measuring technique is established as a standard optical thickness control for thin films in box coaters since 2005. A newly developed set-up of the optical path was designed for the Syruspro 1100 DUV box-coater series. A deuterium lamp in combination with an achromatic lens system extends the monitoring capabilities to the UV range for wavelengths from 200nm up to 380nm. We present the hardware set-up and coating results for various DUV coatings.
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Arhilger et al. (2024) studied this question.
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