By studying the basic principle of ICP and the characteristics of low-temperature plasma, the advantages of using a plasma metal cylinder discharge chamber are discussed, and the influence of skin effect on discharge effect is deeply investigated. COMSOL multi-physics finite element software is used to analyze the physical characteristics of the sensitively coupled plasma. The results show that COMSOL has high feasibility and accuracy in numerical simulation of the perceptual-coupled plasma, which provides theoretical and technical support for the application of plasma in material processing, environmental purification, and other fields.
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Huang et al. (2024) studied this question.
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