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Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of 1.3×1.5 μm 2 were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N 2 O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding 5×10 7 nits and 7×10 4 mW/cm 2 . And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. These results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.
Xu et al. (Mon,) studied this question.