Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

We fabricated a frequency-modulated continuous-wave light detection and ranging (FMCW LiDAR) chip that integrates a slow-light grating (SLG) beam scanner and an optical interferometer for k-clock generation using silicon photonics. Beam scanning and FMCW light generation were performed simultaneously through a wavelength sweep, while the sweep nonlinearity was compensated by resampling the ranging signal using the k-clock. The interferometer incorporated a 24-cm-long Si waveguide delay line, facilitating ranging up to 7.1 m and the capture of point cloud images. The possibility of ranging longer distances by lengthening the waveguide and increasing the interpolation is discussed.