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May 20, 2024ScilightOpen Access

Secondary ion mass spectrometry helps semiconductor manufacturing

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Abstract

Adapting SIMS to monitor rapid thermal anneal enables more accurate and reliable semiconductor device manufacturing.

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Cite This Study

Maura Shapiro (2024) studied this question.

synapsesocial.com/papers/68e695b1b6db64358761bf34 https://doi.org/10.1063/10.0026156

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