Exploring Triboelectric Properties in Sputtered Si(100)/SiO₂/Cr/ZnO Thin Films - Ag/FEP Using Contact Speration Technique for Renewable Energy Harvesting

Currently, there is an ongoing inquiry into triboelectric nanogenerators (TENG), which use the triboelectric phenomenon to capture electrical energy from mechanical vibrations. The work aims to figure out the magnetron sputtered Cr/ZnO-based films on SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> /Si(100) substrates with the construction of a Cr/ZnO-Ag/FEP tribo-based nanogenerator (TENG) and a specific emphasis on measuring TENG properties. The structural investigation of these films was conducted using X-ray diffraction (XRD) photoluminescence (PL), attenuated total reflectance fourier-transform infrared spectroscopy (AT-FTIR), and current - voltage (I-V) analysis in contact-separation mode (CSM). The Cr/ZnO-Ag/FEP TENG has a notable instantaneous maximum output voltage of around 63 V and a current density of 7 µA/cm 2 when compared to other nanogenerators based on semiconductors, as determined by a comparative analysis. The results of this study provide useful information on the possible application of optimized magnetron sputtered Cr/ZnO-based films in triboelectric and energy harvesting systems, which might contribute to the progress of sustainable and renewable energy technologies.