LAGP solid-state electrolyte for electric double layer gating of In2O3 field-effect transistors

Solid electrolyte is a new kind of material which has been widely used in battery field in recent years. In recent years, due to the extensive progress of battery technology, various air-stabilized solid electrolytes have been developed, and this stable transport characteristics enables solid electrolytes to be applied to transistor devices. In this paper, the solid electrolyte (LAGP) Li1.5Al0.5Ge1.5(PO₄)₃ was prepared by magnetron sputtering method, the capacitance of LAGP was studied, and the electric double layer effect of lithium-ion solid electrolyte LAGP was used as gate dielectric of metal oxide transistor (MOS transistor), and Si was used as the substrate. In₂O₃ is a semiconductor layer, Al is used as the electrode, and the bottom gate top electrode structure is used to make a good switching ratio (<10⁴ ), good transfer curve characteristics of the transistor. These results demonstrate that Li-ion solid-state electrolytes can be used as advanced thin film materials to replace transistor gate dielectric.