Featuring a prominent performance upgrade, the surface acoustic wave (SAW) device on the multilayer substrate stands out as a strong competitor in fifth-generation (5G) applications. In this paper, harmonics generation in SAW resonators on a 36° YX-LiTaO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> /SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> /SiC substrate is studied experimentally. Comparative analysis with conventional SAW resonators on a bulk substrate reveals that the layered structure exhibits pronounced harmonic responses induced by transverse modes, which stand as a crucial constraint to its nonlinear performance.
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Li et al. (2024) studied this question.
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