The High Beam to Power Efficiency Investigation of Miniaturized Microwave Ion Source

A miniaturized 2.45 GHz microwave ion source (MIS) with plasma chamber of ϕ30 mm × 40 mm that has the ability to produce more than 20 mA CW hydrogen ion beam with 180 W microwave power has been built at Peking University (PKU) 5 years ago 1 . A hibrid discharge principle has been proposed on this kind of MIS 2 . Recently, under the structure of this MIS, factors such as input power, pressure, magnetic field configuration and the size of plasma chamber have been investigated. Based on this research, a more compact 2.45 GHz microwave ion source with inner diameter of 24 mm has been developed. A 32.5 mA hydrogen ion beam was obtained with only 100 W microwave power.