멀티아크 PVD법을 이용한 자동차 스프링강의 TiN 코팅막 잔류응력 거동에 대한 조사

Ion Plating PVD is capable of producing coatings on compounds and ceramics that are generally difficult to react with, and it also has the advantage of reducing the effects of heat during the deposition process because the coating is performed at low temperatures. In this study, TiN or TiC coating films were formed on automotive spring steel (SUP9A) substrates to investigate the residual stress behavior near the coating film and substrate interface when repeatedly applied deflection bending loads. The TiN-coated film and TiC-coated film produced by the Multi-Arc method of the PVD system showed a preferential orientation in the [111] axis, whereas the TiN-coated film produced by the Dynamic-Mixing method showed a very strong preferential orientation in the [100] axis. During the repeated bending loading process, the residual stress value of the coating film showed little change, while the compressive residual stress increased at the beginning of the bending loading and saturated to a load-dependent compressive residual stress value in the substrate interface layer subjected to tension.