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April 29, 2024MicromachinesOpen Access

Design and Growth of Low Resistivity P-Type AlGaN Superlattice Structure

Yang Liu Xiaowei Zhou Peixian Li Bo Yang Zhuang Zhao

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Abstract

This work investigated the impact of periodic thickness and doping region on the doping efficiency of the P-type AlGaN superlattice. In this paper, the band structure of the simulated superlattice was analyzed. The superlattice structure of Al

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Cite This Study

Liu et al. (2024) studied this question.

synapsesocial.com/papers/68e6d073b6db64358764e8a5 https://doi.org/10.3390/mi15050596

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