A 0.1 GHz to 1.1 THz Inverted Grounded-CPW mTRL Calibration Kit Characterization in an InP HBT Process

We report a novel design approach of on-wafer multiline thru-reflect-line (mTRL) calibration kit fabricated on a commercial semiconductor-based transistor process that we validate from 0.1 GHz to 1.1 THz. The on-wafer calibration standards are designed with an innovative inverted grounded-coplanar waveguide (G-CPW) transmission line, where the calibration reference planes, buried under multiple layers of interconnects, provide direct access to the heterojunction-bipolar-transistor (HBT). We connect the different levels of ground-plane metallization with vias to avoid coupling with adjacent structures and limit the propagation of higher-order modes. We validate this approach with measurements of the complex characteristic impedance of the inverted G-CPW lines, the S-parameters of a 775 μm line, and a 600 GHz common-base amplifier.