Review demonstrates resolution enhancement down to tens of nanometers in visible-light lithography, indicating viable low-cost nanopatterning for manufacturing.
Multicolor approaches to resolution enhancement in visible-light lithography hold the promise to afford resolution on the scale of tens of nm for large-area nanofabrication at a cost that is attractive for medium- to small-volume manufacturing applications, as well as in the research laboratory. In this talk I will review the history of multicolor lithography and discuss some of the latest advances in materials and methods.
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Razo et al. (2024) studied this question.
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