This paper reveals design criteria for a micromachined angular rate sensor, suggesting improvements in accuracy and reliability.
The design criteria and performance limits for a two input axis surface micromachined vibratory rate gyro are presented. Mechanical design, electrostatic drive, capacitive pickoff and noise sources are considered. Detailed issues include frequency tuning and residual strain gradient effects. A two input axis angular rate sensor integrated with BiCMOS electronics has been fabricated following these design criteria.
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Ljung et al. (1995) studied this question.