Compact interferometer devices for chip-based chem-bio sensing

Changes in the real and imaginary parts of the waveguide effective index in the presence of analytes have been used in various microcavity and slow light devices for on-chip sensing and absorption spectroscopy respectively in diverse applications. Periodically patterned waveguide sensors in interferometer configurations can lead to small interferometer sizes comparable in dimensions to microcavity resonator sensors, and/or significantly higher sensitivities compared to resonator type sensors. We show our work with compact silicon photonic interferometer devices for on-chip biosensing and absorbance sensing, overcoming fabrication tolerances with post-fabrication phase trimming.