Fano Resonance Thermo-Optic Modulator Based on Double T-Bus Waveguides-Coupled Micro-Ring Resonator

For the silicon optical computing chip, the optical convolution unit based on the micro-ring modulator has been demonstrated to have high integration and large computing density. To further reduce power consumption, a novel, simple Fano resonant thermo-optic modulator is presented with numerical simulation and experimental demonstration. This designed Fano resonator comprises double T-shaped waveguides and a micro-ring with a radius of 10 μm. Compared with the free use of bus waveguides, our double T-shaped waveguides generate a phase shift, along with a Fano-like line shape. The experimental results show that the resonant wavelength shift of the designed modulator is 2.4 nm with a driven power of 20 mW. In addition, the maximum spectral resolution and the extinction ratio are 70.30 dB/nm and 12.69 dB, respectively. For our thermo-optic modulator, the optical intensity power consumption sensitivity of 7.60 dB/mW is three times as large as that of the micro-ring modulator. This work has broad potential to provide a low-power-consumption essential component for large-scale on-chip modulation for optical computing with compatible metal oxygen semiconductor processes.