Monolithic high contrast grating integrated with metal as a transparent conductive electrode for infrared optoelectronics

The design of transparent conductive electrodes (TCEs) for optoelectronic devices requires a trade-off between high conductivity or transmittivity, limiting their efficiency. This paper demonstrates a novel approach to fabricating TCEs: a monolithic GaAs high contrast grating integrated with metal (metalMHCG). The technology and influence of fabricated different configurations of metalMHCG on the optical parameters will be shown. We will demonstrate above 90% absolute transmittiance of unpolarized light, resulting in 130% transmittance relative to plain GaAs substrate. Despite record high transmittance, the sheet resistance of the metalMHCG is several times lower than any other TCE, ranging from 0.5 to 1 OhmSq−1.