Modeling and Identification of Inter-Stage Couplings and Disturbances in a High-Precision Nanopositioning and Nanomeasuring Machine

To control large nanopositioning and nanomeasuring machines with an accuracy of a few nanometers, accurate models are essential. Therefore, this paper presents a detailed model of such a machine that includes all interstage couplings. The model includes a comprehensive disturbance model, that accounts for air disturbances and frictional forces. For the latter, a novel gray-box model is derived using an elastoplastic model and Sparse Gaussian Progress Regression (SGPR). The methodology employed to identify the machine's model is subsequently discussed, followed by validation of its accuracy.