Fabrication of Hybrid Micro/Nano Structures on Titanium by Vector Femtosecond Laser Beam

The morphology of laser-induced periodic surface structures (LIPSS) and micro/nanostructures may be influenced by laser optics or process parameters. This study focused on two beam profiles, Gaussian and vector beams. Vector beam is an annular beam with a null intensity at its center. Radial and azimuthal polarization are the common states of polarization. We investigated Gaussian and vector femtosecond laser beams with the wavelength of 515 nm irradiated on titanium to analyze the ablation crater characterization and the ablation threshold of titanium. Finally, we conducted an experiment on the fabrication of the hybrid micro/nanostructures via spot-by-spot vector beam.