Numerical simulation of disk film piezoelectric actuators with interdigital electrodes

A schematic diagram is presented and an electro-mechanical mathematical model of the functioning of film piezoelectric actuators is developed, in particular: arc -comb (ArcCD) and chordo -comb (ChordCD) disk actuators with two interacting subsystems of interdigitated “tree” IDE-electrodes installed on surface of thin piezoelectric layer. In general, the curvilinear "branches" of both subsystems are interfaced by the type of interdigitated electrodes, for example, in the well-known piezoelectric MFC actuator. A significant increase in the deflection of the membrane with installed ArcCD-actuators was revealed in comparison with the use of traditional piezoelectric actuators for various conditions of membrane fixation, in particular, it's a hinged fixation along its circular perimeter or rigid fixation along its center. The results of modal analysis are presented: the first six natural frequencies and vibrational shapes of the membrane with ArcCD-actuators.