Basic research on carbon nanotube pellicles enhances heat resistance and supports strategic partnerships for next-generation EUV scanners.
Carbon nanotube (CNT) pellicles with high heat resistance and high EUV transmittance are the most promising candidates for next-generation EUV pellicles. Mitsui Chemicals started basic research on CNT pellicles in 2015, and signed a strategic partnership agreement with imec from 2023 to promote mass production of the first generation CNT pellicle and deployment of next-generation pellicles compatible with EUV scanners equipped with high-power EUV sources. In this presentation, we will introduce the basic characteristics of CNT pellicles, the current status and future prospects regarding lifetime extension.
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Ono et al. (2025) studied this question.
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