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January 22, 2026Advanced Materials InterfacesOpen Access

Influence of Metal Oxide Interface Layers on the Thermochromic Properties of VO 2 Thin Films Deposited by Magnetron Sputtering

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Authors

EBEduard Llorens BaladaESEugen Stamate

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Overview

Research demonstrates that interface layers affect transition temperature in VO2 thin films, indicating potential for improved thermal control applications.

Key Points

  • The study aims to investigate how metal oxide interface layers influence the thermochromic properties of VO2 thin films.
  • Deposited VO2 thin films using RF magnetron sputtering on Al-doped ZnO coated fused silica.
  • Utilized Al2O3, TiO2, and WO3 as interface layers to control transition temperature.
  • Applied annealing under nitrogen atmosphere to promote diffusion from the interface into the VO2 films.
  • Achieved a decrease in metal-to-insulator transition temperature from 68°C to 55°C.
  • Identified that matching crystalline structures and high oxygen flows during deposition increased doping/diffusion into VO2.
  • Noted that tuning oxygen flow rate during deposition on a WO3 interface layer significantly impacted properties.

Cite This Study

Balada et al. (2026) studied this question.

synapsesocial.com/papers/6971bd6a642b1836717e2141https://doi.org/10.1002/admi.202500851
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