Fabrication and Characterization of Silver-Based Thin-Film Temperature Sensors Using Image Reversal Lithography for Educational Purposes

This preprint presents the complete fabrication and characterization workflow of a silver-based thin-film temperature sensor developed in an academic cleanroom environment. The process includes wafer dicing, spin-coated photoresist deposition, UV lithography using an image reversal technique, DC magnetron sputtering, and lift-off processing. Electrical and thermal characterization was performed to evaluate film thickness, edge quality, electrical resistance, and temperature coefficient of resistance (TCR). The work is intended for educational and research purposes in microfabrication and sensor technology.