Demonstrates ultrafast optical-constant determination in thin films and mirrors by advanced spectroscopy techniques.
We demonstrate extreme-ultraviolet (EUV) spectroscopic ellipsometry (SE) using a tabletop high-harmonic generation (HHG) source for optical-constant determination. The polarization-resolved system enables accurate retrieval of the complex refractive index n − i k , as validated by measurements on a Nb 2 O 5 film and by indirect determination of the optical constants of molybdenum and gold mirrors in the analyzer. This approach provides a compact and versatile platform for precise EUV optical-constant determination and future ultrafast studies.
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Li et al. (2026) studied this question.
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