Numerical simulation of plasma in a 915 MHz MPCVD reactor using a simplified 2D structure

Key Points

• Plasma behavior in the 915 MHz MPCVD reactor was accurately represented through numerical simulations, indicating effective model validity.
• Key results included spectral analysis of plasma, with insights that could enhance reactor performance and efficiency.
• The study involved numerical simulations focused on a simplified 2D structure to model complex plasma dynamics in the reactor.
• Findings support the need for refining reactor design based on plasma distribution yet remain specific to the simulation model.