Analytical and experimental assessments reveal key electromagnetic properties in a plasma chamber, indicating potential improvements in energy transfer efficiency.
The electron heating process in an ECR ion source is affected by the electromagnetic properties of the plasma chamber and by the coupling properties of microwave generators with the chamber itself. Hence, the theoretical and experimental study of these properties is very important in order to improve the transfer of the electromagnetic waves energy to the plasma electrons. In this report an analytical and numerical characterization of the SERSE plasma chamber resonant modes is presented along with an experimental and numerical characterization of the microwave coupling.
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S. et al. (2006) studied this question.
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