Digital Logic Deformation Design and Wafer‐Level MEMS Manufacture of Linear Piezoelectric Microactuator With High‐Thrust‐Density

Piezoelectric actuators exhibit advantages such as high precision, no electromagnetic interference, and compact structure, so they have great application potential in fields such as aerospace, biomedicine, and micro‐robotics. With the rapid advancement of high‐end precision equipment and intelligent systems, piezoelectric actuators need both miniaturization and high thrust density. This work innovatively proposes a universal digital logic deformation design criterion for linear piezoelectric microactuator (LPMA) based on XNOR logic operation. The influence of key structural parameters on the actuator's mode frequency and amplitude is systematically investigated. Furthermore, a MEMS‐based process technology route has been developed to achieve the array fabrication of LPMA, with each actuator possessing a thickness of 0.6 mm. The actuator produces a maximum no‐load speed of 76.2 mm s −1 and a peak thrust force of 58 mN when the driving voltage is 80 Vpp. Notably, the thrust density (ratio of thrust to actuator volume) reaches an impressive value of 12.08 mN mm − 3 . The design and fabrication method of piezoelectric microactuator with high thrust density proposed in this paper will promote technological innovation and open new avenues for precision actuation in advanced manufacturing, medical equipment, optical system and aerospace technology.