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March 10, 2026Advanced Electronic Materials2 citationsOpen Access

Performance Enhancement in Hafnium Oxide Through Homogeneous and Heterogeneous co‐Doping Strategies

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SYShouzhuo YangDLDavid LehningerMNMarkus Neuber

Key Points

  • The research aims to optimize dopants and processing parameters to improve the properties of hafnium oxide.
  • Explored homogeneous and heterogeneous co-doping strategies for hafnium oxide.
  • Analyzed the effects of dopants on crystallization behavior and polarization hysteresis.
  • Provided guidelines for optimizing ferroelectric properties for various applications.
  • Observed improved reliability and stabilization of the ferroelectric phase.
  • Demonstrated desired changes in polarization hysteresis shape and position.
  • Highlighted extensive applications in non-volatile memories, sensors, and energy harvesting devices.

Abstract

ABSTRACT Fluorite structure ferroelectrics, especially hafnium oxide, are widely investigated for their application in non‐volatile memories, sensors, actuators, RF devices, and energy harvesters. Due to the metastable nature of the ferroelectric phase in these materials, dopants, and process parameters need to be optimized for its stabilization. Here, we present clear evidence of how dopants affect the properties in this material system and solutions to achieve improved reliability, desired crystallization behavior, and polarization hysteresis shape/position through co‐doping. Finally, the benefits of co‐doping in a variety of application fields are demonstrated. This study provides a comprehensive ‘co‐doping toolkit’ for tailoring fluorite‐structure ferroelectrics to meet specific application requirements.

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Cite This Study

Yang et al. (2026) studied this question.

synapsesocial.com/papers/69af95c070916d39fea4db64https://doi.org/10.1002/aelm.202500764
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