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March 15, 2026Sensors0 citationsOpen Access

Transient Charge Collection in Ultra-Thin SiC Membranes for Single-Ion Detection

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ESEnrico SangregorioInstitute for Microelectronics and MicrosystemsAMAlfio Samuele MancusoUniversity of CataniaSLSaverio De LucaInstitute for Microelectronics and Microsystems

Key Points

  • The aim is to analyze charge-collection dynamics in ultra-thin membrane SiC detectors for single-ion detection.
  • Utilized time-dependent TCAD simulations for device analysis.
  • Compared charge collection in bulk versus membrane detector geometries.
  • Conducted two-dimensional simulations for current-density characterizations.
  • Membrane detectors showed a short secondary component in transient response, returning to zero within 3.5 × 10–10 s.
  • Bulk devices displayed a prolonged secondary response with a long tail of charge collection.
  • Substrate removal enhanced timing precision and minimized charge loss.

Abstract

Silicon carbide (SiC) detectors continue to emerge as a promising technology for applications requiring radiation hardness, fast response times, and stable operation in harsh environments. In this work, the charge-collection dynamics of ultra-thin membrane SiC detectors are investigated through time-dependent TCAD simulations, consistent with previously reported measurements. The study analyzes the transient response following the localized generation of electron–hole pairs induced by ions, comparing bulk and membrane detector geometries with identical active-layer thicknesses. Two-dimensional simulations provide a time-resolved characterization of the electron and hole current-density distributions within the active region of the device. The results show that both device architectures present a transient current signal featuring two main components. Despite similarities in the prompt drift-driven signal component, the SiC membrane response is characterized by a short secondary component returning to zero within 3.5 × 10–10 s at zero external bias, making it well-suited for reliable single-ion detection. In contrast, bulk devices exhibit a markedly different response, characterized by a significantly more intense and prolonged secondary component followed by a long tail that does not return to zero within the simulation time window for all investigated reverse biases. This tail is the result of the collection of carriers generated in the substrate that reach the depletion region through diffusion-driven processes. These findings contribute to the optimization of SiC-based solid-state detectors for quantum-technology device fabrication, demonstrating that the removal of the substrate drastically reduces the diffusion-dominated current component, thereby ensuring precise timing and minimal charge loss.

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Cite This Study

Sangregorio et al. (2026) studied this question.

synapsesocial.com/papers/69b606af83145bc643d1cd0fhttps://doi.org/10.3390/s26061809
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