This method measures surface spacing in optical components, suggesting improved precision and efficiency in metrology.
A four-quadrant low-coherence envelope detection method was proposed for measuring the surface spacing of optical components, eliminating the requirement for precise control of the delay line scanning step to generate a π/2 phase shift. The method employs an orthogonal polarization Mach–Zehnder (MZ) fiber interferometer, illuminated by a broadband superluminescent diode (SLD), and a four-quadrant polarization-resolved detector to simultaneously acquire spatially phase-shifted interference signals carrying surface spacing information. The interference envelope is directly demodulated to extract surface spacing, thereby decoupling measurement accuracy from mechanical stepping constraints. To enable real-time, high-precision calibration of the delay line, two complementary schemes were implemented: wavelength division multiplexing (WDM)-based calibration and dual optical path calibration. Experimental results confirm that the dual-path scheme exhibits weak dependence on scanning velocity and remains stable across a wide speed range. Repeat measurements of the surface spacing of a 1 mm thick sapphire plate yielded a standard deviation (STD) of 1.3 μm. By relaxing the strict π/2 phase shift condition traditionally imposed on scanning step size, this method improves operational efficiency while maintaining measurement reliability—providing a robust and broadly applicable solution for metrology, including lens surface spacing and transparent plate thickness characterization.
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Shan et al. (2026) studied this question.
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