An advanced thermometer demonstrates high resolution and sensitivity across a broad temperature range, suggesting potential for future thermal sensing applications.
Precise temperature measurement at the micro- and nanoscale is essential for a wide range of cutting-edge applications, from bio-calorimetry and quantum technologies to energy systems and thermal regulation in miniaturized electronics. Conventional thermometers, however, often fall short due to bulky designs, limited sensitivity, significant noise interference, and constrained temperature ranges. In this study, we present an advanced single-crystal diamond MEMS thermometer that exploits both exceptionally high quality (Q) factors and higher-order mechanical resonances. Our device achieves a temperature resolution of 100 μK and a remarkable sensitivity of ~22 nK/Hz¹/², operating reliably across a wide temperature span from 6.5 K up to 380 K. These capabilities position diamond-based MEMS resonators as a highly promising solution for next-generation thermal sensing in challenging and extreme environments.
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Zhao et al. (2025) studied this question.
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