In this study, we investigated which piezoelectric material is suitable to enhance the performance of a bulk acoustic wave (BAW) gyroscope utilizing a piezoelectric thin film. The figure of merit (FOM) based on the material properties was defined considering the operation principle of the gyroscope. Also, a concreat device was modeled and operated in simulation. As a result, it was demonstrated that the FOM is alomost propotional to the scale factor, and single-crystal (SC) Pb(Zr,Ti)O3 (PZT) is one of the suitable materials. Then, we designed, prototyped, and characterized a resonator using SC PZT for the gyroscope. The resonator was successfully vibrated at a mechanical quality factor of 3,000 in air.
Iwata et al. (Wed,) studied this question.