Electron Swarm Parameters in SiH4/H2.

A Monte Carlo technique is used for investigating electron swarm motion in the presence of elastic, excitation, ionization and attachment collisions through a SiH4 (20%) /H2 (80%) mixture under uniform field conditions. It has been shown that mixing a fraction of SiH4 into the hydrogen gas gives rise to drastic changes in the electron energy distribution function. This fact indicates that the swarm parameters in the mixture can not be reduced by combining each of the swarm parameters obtained individually in SiH4 and H2 assuming a linear relationship of the values to their partial pressure ratios. The swarm parameters for drift velocity (υd), mean energy (ε) , ionization (α/p) , excitation (αex/p) , dissociation (αd/p) and attachment (η/p) coefficients are evaluated directly by using the electron energy distribution functions obtained by the simulation in the E/p range of 10-2000 V/cmTorr.