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April 3, 2026ACS Photonics2 citationsOpen Access

Realization of a Full-Color Micro-LED Display via Nano-Phosphor Photolithographic Patterning

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ZPZengzhi PeiJOJustin OttoWBWenni Bai

Key Points

  • This research aims to develop a high-resolution, full-color Micro-LED display by integrating RGB emission efficiently through innovative fabrication methods.
  • Fabrication of a Micro-LED display incorporating nanophosphor thin films.
  • Utilization of photolithographic patterning for precise layer alignment.
  • Implementation of a prepatterned color filter array.
  • Testing of RGB output and internal quantum efficiency.
  • Achieved strong pixel-level color conversion with minimal crosstalk.
  • Demonstrated an internal quantum efficiency of approximately 86% for the phosphor layer.
  • Achieved over 99% thermal emission recovery after exposure to 150 °C.
  • Exhibited a chromaticity white point close to the D65 standard for accurate color representation.

Abstract

Realizing high-resolution, full-color Micro-LED displays remains a central challenge due to the difficulty of integrating red, green, and blue (RGB) emission with scalable and manufacturable processes. In this work, we report the successful fabrication of a full-color Micro-LED display device based on photolithographically patterned nanophosphor thin films, a prepatterned color filter array, and a blue-emitting Micro-LED panel. The nanophosphor layers were precisely aligned to the subpixel layout via lithographic processes, enabling pixel-level color conversion with strong emission confinement and minimal crosstalk. The integrated display exhibits uniform RGB output, an internal quantum efficiency of ∼86% for the phosphor layer, >99% thermal emission recovery after 150 °C exposure, and a chromaticity white point close to the D65 standard. These results demonstrate a fully realized, manufacturable full-color Micro-LED display platform that is both scalable and suitable for high-performance applications such as AR/VR and compact visual systems.

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Cite This Study

Pei et al. (2026) studied this question.

synapsesocial.com/papers/69cf5db15a333a821460b94chttps://doi.org/10.1021/acsphotonics.5c02542
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