Project develops a precision metrology system, enhancing measurement accuracy for x-ray gratings, suggesting better calibration techniques.
We discuss a project to develop a precision metrology system for variable-line-spacing x-ray gratings using interferometric microscopes. We are developing test standards and calibration techniques to measure and correct for geometrical distortion and blur, and data processing techniques to combine multiple measurements and measure line spacing with high accuracy.
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Yashchuk et al. (2026) studied this question.
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