Exciton transitions and oxygen as a donor in m-plane AlN homoepitaxial films

High-resolution photoluminescence studies on m-plane (1-100) homoepitaxial films grown by metalorganic chemical vapor deposition on AlN revealed several sharp donor-bound exciton (DBX) peaks with a full width at half maximum as narrow as 550 μeV. Power dependent photoluminescence distinguished DBXs tied to the Γ5 free exciton (FX) from those tied to the Γ1 FX. Both the n = 2 and n = 1 excited states of the Γ5 and Γ1 were resolved, giving binding energies of 52 meV and 55 meV, respectively. The DBX transition at 6.006 eV was identified as originating from the neutral-donor-oxygen (O0X). This assignment was based on secondary ion mass spectroscopy measurements, peak position with respect to the Si0X, and deep defect luminescence peaks located at 3.25 eV and 3.58 eV.